Gary Rubloff, PhD

1969 Hertz Fellow
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Gary Rubloff is a Distinguished University Professor and Minta Martin Professor of Engineering at the University of Maryland, with primary appointments in Materials Science and Engineering, the Institute for Systems Research, and the Institute for Research in Electronics and Applied Physics.

Following his PhD in physics at University of Chicago and a postdoc at Brown University, he held research and research management positions at IBM Research Yorktown Heights in Physical Sciences, Silicon Technology, and Manufacturing Research, where his leadership in ultraclean integrated semiconductor processing and diagnostics led to his receipt of the AVS Gaede-Langmuir Prize in 2000. He is a Fellow of the American Physical Society and the American Vacuum Society.

During 1993-1996 he was Associate Director of the Center for Advanced Electronic Materials Processing at NCSU and Professor in ECE. He joined UMD in 1996, where he was Director of the Institute for Systems Research, an NSF Engineering Research Center, until 2001. He served as the founding Director of the Maryland NanoCenter (www.nanocenter.umd.edu) from 2004 to 2018. In 2009 he and Prof. Sang Bok Lee initiated Nanostructures for Electrical Energy Storage (www.efrc.umd.edu), a DOE Energy Frontier Research Center, where Rubloff served as Director from 2009 to 2020. He was a member of the DOE Basic Energy Sciences Advisory Committee (BESAC), a Federal Advisory Committee, from 2013 to 2018 and participated and led a variety of BESAC activities.

Professor Rubloff has published over 300 papers and holds 27 U.S. patents, with his research spanning a diverse set of topics, including surface and solid state science, electronic materials and processing, real-time sensing/metrology and advanced process control, biofabrication and biomicrosystems for metabolic engineering and biological signaling, nanoscale processes and atomic layer deposition, and multicomponent multifunctional nanostructures for energy applications.

Graduate Studies

University of Chicago
Solid State Physics
Far-Ultraviolet Reflectance Spectra and the Electronic Structure of Ionic Crystals

Awards

1986, Fellow, American Physical Society